- 专利标题: Photomask, method for manufacturing the same, and method for measuring optical characteristics of wafer exposure system using the photomask during operation
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申请号: US10383192申请日: 2003-03-06
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公开(公告)号: US07070891B2公开(公告)日: 2006-07-04
- 发明人: Tae-moon Jeong , Seong-hyuck Kim , Seong-woon Choi
- 申请人: Tae-moon Jeong , Seong-hyuck Kim , Seong-woon Choi
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Mills & Onello LLP
- 优先权: KR2002-13263 20020312
- 主分类号: G03C5/00
- IPC分类号: G03C5/00 ; G03F9/00
摘要:
Provided are a photomask, a method for manufacturing the photomask and a method for measuring optical characteristics of a wafer exposure system, the measuring method using the photomask during manufacture. The photomask includes a substrate and a measuring pattern including a light opaque region pattern formed on the substrate and a plurality of light transmitting region patterns that are formed in regions divided by the light opaque region pattern and provoke phase shifts to provide phase differences to light transmitted through light transmitting regions. Precise measurements of the degree of a focus and lens aberrations of an exposure system using the photomask are obtained.
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