发明授权
US07072578B2 Carbon wire heating object sealing heater and fluid heating apparatus using the same heater
有权
碳丝加热对象密封加热器和使用相同加热器的流体加热装置
- 专利标题: Carbon wire heating object sealing heater and fluid heating apparatus using the same heater
- 专利标题(中): 碳丝加热对象密封加热器和使用相同加热器的流体加热装置
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申请号: US11038283申请日: 2005-01-21
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公开(公告)号: US07072578B2公开(公告)日: 2006-07-04
- 发明人: Norihiko Saito , Hiroyuki Honma , Hiroshi Mori , Eiichi Toya , Tomio Konn , Tomohiro Nagata , Sunao Seko , Akira Otsu , Takanori Saito , Ken Nakao , Kazutoshi Miura , Harunari Hasegawa , George Hoshi , Katsutoshi Ishi
- 申请人: Norihiko Saito , Hiroyuki Honma , Hiroshi Mori , Eiichi Toya , Tomio Konn , Tomohiro Nagata , Sunao Seko , Akira Otsu , Takanori Saito , Ken Nakao , Kazutoshi Miura , Harunari Hasegawa , George Hoshi , Katsutoshi Ishi
- 申请人地址: JP Tokyo JP Tokyo
- 专利权人: Toshiba Ceramics Co., Ltd.,Tokyo Electron Limited
- 当前专利权人: Toshiba Ceramics Co., Ltd.,Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo JP Tokyo
- 代理机构: Foley & Lardner LLP
- 优先权: JP2002-083078 20020325; JP2002-094543 20020329; JP2002-094544 20020329; JP2002-094546 20020329; JP2002-325380 20021108; JP2002-353842 20021205
- 主分类号: H05B3/00
- IPC分类号: H05B3/00
摘要:
A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2×10−3 g/cm3 or less.