发明授权
- 专利标题: Method for separating sapphire wafer into chips
- 专利标题(中): 将蓝宝石晶片分离成芯片的方法
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申请号: US10806433申请日: 2004-03-23
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公开(公告)号: US07074652B2公开(公告)日: 2006-07-11
- 发明人: Jeong Goo Yoon , Bang Won Oh , Kuk Hwea Yi
- 申请人: Jeong Goo Yoon , Bang Won Oh , Kuk Hwea Yi
- 申请人地址: KR Kyungki-Do
- 专利权人: Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人: Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人地址: KR Kyungki-Do
- 代理机构: Lowe Hauptman & Berner, LLP.
- 优先权: KR10-2003-0066079 20030923
- 主分类号: H01L21/48
- IPC分类号: H01L21/48 ; G03C5/00
摘要:
Disclosed is a method for efficiently separating a sapphire wafer serving as a substrate, on which semiconductor elements are formed, into unit chips by scribing the sapphire wafer, after grinding and lapping a rear surface of the sapphire wafer and then sand-blasting the sapphire wafer. The method includes the steps of: (a) grinding a rear surface of the sapphire wafer so that the sapphire wafer has a designated thickness; (b) lapping the rear surface of the ground sapphire wafer so that the sapphire wafer has a designated thickness; (c) polishing the rear surface of the lapped sapphire wafer so that the sapphire wafer has a designated thickness; (d) sand-blasting the rear surface of the polished sapphire wafer by uniformly blasting particles at a designated pressure during a designated time onto the rear surface of the polished sapphire wafer; and (e) scribing the rear surface of the sand-blast ground sapphire wafer.
公开/授权文献
- US20050079687A1 Method for separating sapphire wafer into chips 公开/授权日:2005-04-14
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