Invention Grant
- Patent Title: Electron beam apparatus with potential specifying plate structure
- Patent Title (中): 具有电位指定板结构的电子束装置
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Application No.: US10684374Application Date: 2003-10-15
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Publication No.: US07075223B2Publication Date: 2006-07-11
- Inventor: Yoichi Ando
- Applicant: Yoichi Ando
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2002-308492 20021023
- Main IPC: H01J1/62
- IPC: H01J1/62 ; H01J63/04

Abstract:
In an electron beam apparatus including an electron source and an electron beam irradiation member, a potential specifying plate including openings through which an electron transmits is provided between the electron source and the electron beam irradiation member. A spacer is located between the electron beam irradiation member and the potential specifying plate. In the case where a distance between a region between one opening of the potential specifying plate near the spacer and the spacer and the electron beam irradiation member is D1 and a distance between a region between that opening and another opening not near the spacer and the electron beam irradiation member is given by D2, if D1
Public/Granted literature
- US20040080259A1 Electron beam apparatus Public/Granted day:2004-04-29
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