Invention Grant
US07078278B2 Dual-metal CMOS transistors with tunable gate electrode work function and method of making the same
有权
具有可调栅电极功能的双金属CMOS晶体管及其制作方法
- Patent Title: Dual-metal CMOS transistors with tunable gate electrode work function and method of making the same
- Patent Title (中): 具有可调栅电极功能的双金属CMOS晶体管及其制作方法
-
Application No.: US10833073Application Date: 2004-04-28
-
Publication No.: US07078278B2Publication Date: 2006-07-18
- Inventor: James Pan , Ming-Ren Lin
- Applicant: James Pan , Ming-Ren Lin
- Applicant Address: US CA Sunnyvale
- Assignee: Advanced Micro Devices, Inc.
- Current Assignee: Advanced Micro Devices, Inc.
- Current Assignee Address: US CA Sunnyvale
- Main IPC: H01L28/80
- IPC: H01L28/80

Abstract:
A dual-metal CMOS arrangement and method of making the same provides a substrate and a plurality of NMOS devices and PMOS devices formed on the substrate. Each of the plurality of NMOS devices and PMOS devices have gate electrodes. Each NMOS gate electrode includes a first silicide region on the substrate and a first metal region on the first silicide region. The first silicide region of the NMOS gate electrode consists of a first silicide having a work function that is close to the conduction band of silicon. Each of the PMOS gate electrodes includes a second silicide region on the substrate and a second metal region on the second silicide region. The second silicide region of the PMOS gate electrode consists of a second silicide having a work function that is close to the valence band of silicon.
Public/Granted literature
- US20050245016A1 Dual-metal CMOS transistors with tunable gate electrode work function and method of making the same Public/Granted day:2005-11-03
Information query