发明授权
US07079224B2 Arrangement for debris reduction in a radiation source based on a plasma
有权
基于等离子体的辐射源中碎片减少的布置
- 专利标题: Arrangement for debris reduction in a radiation source based on a plasma
- 专利标题(中): 基于等离子体的辐射源中碎片减少的布置
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申请号: US10784438申请日: 2004-02-23
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公开(公告)号: US07079224B2公开(公告)日: 2006-07-18
- 发明人: Duc Chinh Tran , Juergen Kleinschmidt
- 申请人: Duc Chinh Tran , Juergen Kleinschmidt
- 申请人地址: DE Jena
- 专利权人: XTREME technologies GmbH
- 当前专利权人: XTREME technologies GmbH
- 当前专利权人地址: DE Jena
- 代理机构: Reed Smith LLP
- 优先权: DE10308174 20030224
- 主分类号: G03B27/42
- IPC分类号: G03B27/42
摘要:
The invention is directed to an arrangement for debris reduction in a radiation source based on a plasma, particularly for generating bundled radiation in the extreme ultraviolet (EUV) spectral region. The object of the invention, to find a novel possibility for beam shaping and debris reduction in a radiation source based on a plasma which substantially increases the life of collector optics without having to tolerate a substantial reduction in transparency or a sudden destruction of the protective mechanism, is met according to the invention in that exchangeable additional optics are arranged in the radiation path between a conventional debris filter and the collector optics, wherein a distance-increasing intermediate imaging of the source location relative to the collector optics is provided by the additional optics for further debris reduction.
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