发明授权
US07081278B2 Method for protection of adhesives used to secure optics from ultra-violet light
有权
用于保护用于将光学器件从紫外光中固定的粘合剂的方法
- 专利标题: Method for protection of adhesives used to secure optics from ultra-violet light
- 专利标题(中): 用于保护用于将光学器件从紫外光中固定的粘合剂的方法
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申请号: US10253655申请日: 2002-09-25
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公开(公告)号: US07081278B2公开(公告)日: 2006-07-25
- 发明人: Matthew Lipson , Ronald A Wilklow
- 申请人: Matthew Lipson , Ronald A Wilklow
- 申请人地址: NL Veldhoven
- 专利权人: ASML Holdings N.V.
- 当前专利权人: ASML Holdings N.V.
- 当前专利权人地址: NL Veldhoven
- 代理机构: Sterne, Kessler, Goldstein & Fox PLLC
- 主分类号: B05D3/06
- IPC分类号: B05D3/06 ; B05D5/06 ; G02B7/00
摘要:
A method for reducing the scattered light emitted through an optical element is provided that protects adhesive used to hold the optical element in place from light induced deterioration. In one embodiment, the method includes applying a thin coating of an organoxy metallic compound to a region on an optical element where adhesive will be applied and exposing the organoxy metallic compound to ultra-violet light. Exposure to ultra-violet light converts the organoxy metallic compound to its corresponding metal oxide forming an optically inert, light absorbing coating that protects adhesive used to hold the optical element in place from light induced deterioration.
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