发明授权
- 专利标题： Polycyclic fluoroalkanes
- 专利标题（中）： 多环氟烷烃
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申请号： US11149635申请日： 2005-06-09
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公开(公告)号： US07084314B1公开(公告)日： 2006-08-01
- 发明人: Roger Harquail French , Weiming Qiu , Sheng Peng
- 申请人： Roger Harquail French , Weiming Qiu , Sheng Peng
- 申请人地址： US DE Wilmington
- 专利权人： E. I du Pont de Nemours and Company
- 当前专利权人： E. I du Pont de Nemours and Company
- 当前专利权人地址： US DE Wilmington
- 主分类号： C07C19/08
- IPC分类号： C07C19/08
摘要：
Polycyclic fluoroalkanes that are highly transparent to UV wavelengths ranging from about 190 nm to 260 nm are provided. The polycyclic fluoroallkanes are suitable for use in a variety of applications, particularly in the vacuum UV and deep UV region of the electromagnetic spectrum. For example, the polycyclic fluoroalkanes are useful in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography, particularly at 193 and 248 nm exposure wavelength.
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