发明授权
- 专利标题: Fabrication of structures in an optical substrate
- 专利标题(中): 光学基片中结构的制作
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申请号: US11020894申请日: 2004-12-22
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公开(公告)号: US07085450B2公开(公告)日: 2006-08-01
- 发明人: Levent Biyikli , Jerome C. Porque , James M. Battiato , David B. Stegall
- 申请人: Levent Biyikli , Jerome C. Porque , James M. Battiato , David B. Stegall
- 申请人地址: US MN St. Paul
- 专利权人: 3M Innovative Properties Company
- 当前专利权人: 3M Innovative Properties Company
- 当前专利权人地址: US MN St. Paul
- 代理商 Gregg H. Rosenblatt
- 主分类号: G02B6/34
- IPC分类号: G02B6/34 ; G03C5/00 ; C03B37/022 ; C03B37/023 ; C03B37/018
摘要:
A system and method for fabricating structures in an optical substrate. An optical element produces first and second write beams that intersect at a first intersection location at the optical substrate. The first intersection location includes a fringe pattern produced by the first and second write beams. The optical element also produces first and second reference beams that intersect and are recombined at a second intersection location in substantially the same plane as the first intersection location. A controller then controls relative positioning between the optical substrate and the fringe pattern based on a signal derived from the recombined first and second reference beams.
公开/授权文献
- US20060133728A1 FABRICATION OF STRUCTURES IN AN OPTICAL SUBSTRATE 公开/授权日:2006-06-22
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