- 专利标题: Electrostatic condenser type pressure sensor, and method for manufacturing the pressure sensor
-
申请号: US10452605申请日: 2003-06-02
-
公开(公告)号: US07086287B2公开(公告)日: 2006-08-08
- 发明人: Sadaharu Morishita , Takashi Toya , Shinsuke Yoshida , Satoshi Nozoe , Daisuke Kuzuyama
- 申请人: Sadaharu Morishita , Takashi Toya , Shinsuke Yoshida , Satoshi Nozoe , Daisuke Kuzuyama
- 申请人地址: JP Kyoto
- 专利权人: Omron Corporation
- 当前专利权人: Omron Corporation
- 当前专利权人地址: JP Kyoto
- 代理机构: Osha Liang LLP
- 优先权: JP2002/161810 20020603
- 主分类号: G01L9/00
- IPC分类号: G01L9/00
摘要:
The present invention provides a small-sized electrostatic condenser type pressure sensor having high assembly accuracy but no dispersion in a detection accuracy, and a method for manufacturing the pressure sensor. An annular spacer is mounted on the confronting faces of substrates around flat electrodes, and a frit is mounted around the spacer and is made of a material having a lower softening or melting point than that of the spacer.
公开/授权文献
信息查询