发明授权
- 专利标题: Hinge structure of micromirror device
- 专利标题(中): 微镜装置的铰链结构
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申请号: US11042157申请日: 2005-01-26
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公开(公告)号: US07088494B2公开(公告)日: 2006-08-08
- 发明人: Rogerio Jun Mizuno
- 申请人: Rogerio Jun Mizuno
- 申请人地址: JP Tokyo
- 专利权人: PENTAX Corporation
- 当前专利权人: PENTAX Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Greenblum & Bernstein, P.L.C.
- 优先权: JP2004-017907 20040127
- 主分类号: G02B26/00
- IPC分类号: G02B26/00
摘要:
A hinge structure, for rotatably supporting a mirror surface of a micromirror device which rotates the mirror surface around at least an axis for scanning a beam, includes a linear body with one end joined to a surface which is rotated around the axis and the other end joined to a surface which does not rotate around the axis. The linear body includes a linear central part situated on the axis and a pair of extension parts extending from both ends of the central part to both ends of the linear body respectively to surround the central part in the same direction. The extension parts are formed so that space between them will be substantially constant. By the above composition, the hinge structure delivers high spring performance while being small-sized.
公开/授权文献
- US20050162729A1 Hinge structure of micromirror device 公开/授权日:2005-07-28
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