A method for manufacturing a multilayer ceramic substrate including the steps of providing multilayers of ceramic green sheets each having an electrode layer formed on a dielectric layer such that, after firing, at least one electrode layer which is separated by the dielectric layer from the adjacent electrode layer in the substrate has an overlapping area of 0.4 mm2 or smaller with the adjacent electrode; and firing the multilayers of the ceramic green sheets at a selected temperature such that, after firing, an interface between the dielectric layer and the electrode layer in the substrate has irregularities with a roughness Rmax of 6 μm or less per 100 μm standard length and the dielectric layer has a saturation sintered density.