- 专利标题: Negative resist composition
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申请号: US10330332申请日: 2002-12-30
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公开(公告)号: US07090960B2公开(公告)日: 2006-08-15
- 发明人: Shoichiro Yasunami , Kunihiko Kodama
- 申请人: Shoichiro Yasunami , Kunihiko Kodama
- 申请人地址: JP Kanagawa
- 专利权人: Fuji Photo Film Co., Ltd.
- 当前专利权人: Fuji Photo Film Co., Ltd.
- 当前专利权人地址: JP Kanagawa
- 代理机构: Sughrue Mion, PLLC
- 优先权: JPP.2002-004658 20020111; JPP.2002-116216 20020418
- 主分类号: G03F7/038
- IPC分类号: G03F7/038
摘要:
A negative resist composition comprising (A) an alkali-soluble polymer, (B) a cross-linking agent forming cross-links between molecules of the alkali-soluble polymer (A) under the action of an acid and (C) a specified acid generator, which can satisfy all of performance requirements concerning sensitivity, resolution, pattern profile and line-edge roughness in the pattern formation by irradiation with electron beams or X-rays.
公开/授权文献
- US20030165776A1 Negative resist composition 公开/授权日:2003-09-04
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