Invention Grant
US07091544B2 Trench capacitor dynamic random access memory featuring structurally independent symmetric active areas 有权
沟槽电容器动态随机存取存储器,具有结构独立的对称有源区

  • Patent Title: Trench capacitor dynamic random access memory featuring structurally independent symmetric active areas
  • Patent Title (中): 沟槽电容器动态随机存取存储器,具有结构独立的对称有源区
  • Application No.: US10980225
    Application Date: 2004-11-04
  • Publication No.: US07091544B2
    Publication Date: 2006-08-15
  • Inventor: Rui-Yuan HonTony Chien
  • Applicant: Rui-Yuan HonTony Chien
  • Applicant Address: TW
  • Assignee: Promos Technologies Inc.
  • Current Assignee: Promos Technologies Inc.
  • Current Assignee Address: TW
  • Priority: TW93130402A 20041007
  • Main IPC: H01L27/108
  • IPC: H01L27/108
Trench capacitor dynamic random access memory featuring structurally independent symmetric active areas
Abstract:
A dynamic random access memory structure is provided, each active area of a memory unit cell is distributed individually in a substrate, and deep trench patterns are designed to have a checkerboard-like arrangement in the substrate. Also, there is a constant space between each deep trench pattern in a row. Further, long bit line contact plugs are located to electrically connect active areas of two diagonally neighbor memory unit cells, and a contact hole is formed on each long bit line contact plug to enable bit lines contact the long bit line contact plugs so two diagonally neighbor memory unit cells are controlled by the same bit line.
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