Invention Grant
- Patent Title: Microelectromechanical strain gauge with frequency detector
- Patent Title (中): 带有频率检测器的微机电应变仪
-
Application No.: US10675642Application Date: 2003-09-30
-
Publication No.: US07093498B2Publication Date: 2006-08-22
- Inventor: Patrick C. Herbert , Richard D. Harris , Frederick M. Discenzo , Michael J. Knieser , Robert J. Kretschmann , Mark A. Lucak , Robert J. Pond , Louis F. Szabo
- Applicant: Patrick C. Herbert , Richard D. Harris , Frederick M. Discenzo , Michael J. Knieser , Robert J. Kretschmann , Mark A. Lucak , Robert J. Pond , Louis F. Szabo
- Applicant Address: US OH Mayfield Heights
- Assignee: Rockwell Automation Technologies, Inc.
- Current Assignee: Rockwell Automation Technologies, Inc.
- Current Assignee Address: US OH Mayfield Heights
- Agency: Quarles & Brady, LLP
- Agent Alexander R. Kuszewski
- Main IPC: G01B7/16
- IPC: G01B7/16
Abstract:
A microelectromechanical system (MEMS) strain gauge includes at least one flexible arm that can be caused to oscillate. Transverse strain on the arm changes the resonant frequency of the arm. A detector communicating with the flexible arm may detect the frequency of oscillation to provide, an indication of the transverse strain of the substrate.
Public/Granted literature
- US20050068989A1 Microelectromechanical strain gauge Public/Granted day:2005-03-31
Information query
