发明授权
- 专利标题： Polymer based tunneling sensor
- 专利标题（中）： 基于聚合物的隧道传感器
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申请号： US10648927申请日： 2003-08-27
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公开(公告)号： US07094622B1公开(公告)日： 2006-08-22
- 发明人: Tianhong Cui , Jing Wang , Yongjun Zhao
- 申请人： Tianhong Cui , Jing Wang , Yongjun Zhao
- 申请人地址： US LA Ruston
- 专利权人： Louisiana Tech University Foundation, Inc.
- 当前专利权人： Louisiana Tech University Foundation, Inc.
- 当前专利权人地址： US LA Ruston
- 代理机构： Jones, Walker, Waechter, Poitevent, Carrere & Denegre, L.L.P.
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
A process for fabricating a polymer based circuit by the following steps. A mold of a design is formed through a lithography process. The design is transferred to a polymer substrate through a hot embossing process. A metal layer is then deposited over at least part of said design and at least one electrical lead is connected to said metal layer.
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