Invention Grant
US07095024B2 TEM sample equipped with an identifying function, focused ion beam device for processing TEM sample, and transmission electron microscope
有权
具有识别功能的TEM样品，用于处理TEM样品的聚焦离子束装置和透射电子显微镜
- Patent Title: TEM sample equipped with an identifying function, focused ion beam device for processing TEM sample, and transmission electron microscope
- Patent Title (中): 具有识别功能的TEM样品，用于处理TEM样品的聚焦离子束装置和透射电子显微镜
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Application No.: US10828001Application Date: 2004-04-20
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Publication No.: US07095024B2Publication Date: 2006-08-22
- Inventor: Tatsuya Adachi , Toshiaki Fujii , Masashi Iwatsuki , Mikio Naruse , Mike Hassel Shearer
- Applicant: Tatsuya Adachi , Toshiaki Fujii , Masashi Iwatsuki , Mikio Naruse , Mike Hassel Shearer
- Applicant Address: JP Chiba JP Akishima
- Assignee: SII NanoTechnology Inc.,JEOL Ltd.
- Current Assignee: SII NanoTechnology Inc.,JEOL Ltd.
- Current Assignee Address: JP Chiba JP Akishima
- Agency: Adams & Wilks
- Priority: JP2003-117396 20030422
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/304
Abstract:
The problem of the present invention is to provide a TEM sample equipped with an identifying function for easily specifying a detailed TEM sample and to provide a system for handling the management of information relating to the TEM sample using the TEM when making observations that is constructed with the FIB device manufacturing the sample. The TEM sample of the present invention is written with a mark encoding information specifying the sample at a specified location of a peripheral part. Information relating to the sample filed taking sample specifying information as an index is supplied to a TEM as associated matter. The sample working FIB device and observation TEM device of the present invention are provided with a function enabling writing of information relating to the sample and images to the file during operation which is then read out and utilized on a display.
Public/Granted literature
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