发明授权
- 专利标题: Multiple doping level bipolar junctions transistors and method for forming
- 专利标题(中): 多个掺杂级双极结晶体管和形成方法
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申请号: US10953894申请日: 2004-09-29
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公开(公告)号: US07095094B2公开(公告)日: 2006-08-22
- 发明人: Daniel Charles Kerr , Michael Scott Carroll , Amal Ma Hamad , Thiet The Lai , Roger W. Key
- 申请人: Daniel Charles Kerr , Michael Scott Carroll , Amal Ma Hamad , Thiet The Lai , Roger W. Key
- 申请人地址: US PA Allentown
- 专利权人: Agere Systems Inc.
- 当前专利权人: Agere Systems Inc.
- 当前专利权人地址: US PA Allentown
- 主分类号: H01L27/102
- IPC分类号: H01L27/102
摘要:
A process for forming bipolar junction transistors having a plurality of different collector doping densities on a semiconductor substrate and an integrated circuit comprising bipolar junction transistors having a plurality of different collector doping densities. A first group of the transistors are formed during formation of a triple well for use in providing triple well isolation for complementary metal oxide semiconductor field effect transistors also formed on the semiconductor substrate. Additional bipolar junction transistors with different collector doping densities are formed during a second doping step after forming a gate stack for the field effect transistors. Implant doping through bipolar transistor emitter windows forms bipolar transistors having different doping densities than the previously formed bipolar transistors. According to one embodiment of the present invention, bipolar junction transistors having six different collector dopant densities (and thus six different breakdown characteristics) are formed.
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