Invention Grant
- Patent Title: Cathodes for fluorine gas discharge lasers
- Patent Title (中): 氟气放电激光器的阴极
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Application No.: US10672181Application Date: 2003-09-26
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Publication No.: US07095774B2Publication Date: 2006-08-22
- Inventor: Richard G. Morton , Timothy S. Dyer
- Applicant: Richard G. Morton , Timothy S. Dyer
- Applicant Address: US CA San Diego
- Assignee: Cymer, Inc.
- Current Assignee: Cymer, Inc.
- Current Assignee Address: US CA San Diego
- Agent William C. Cray
- Main IPC: H01S3/22
- IPC: H01S3/22 ; H01S3/097

Abstract:
A fluorine gas discharge laser electrode for a gas discharge laser having a laser gas containing fluorine and a method for manufacturing an electrode is disclosed. The electrode may include a copper and copper alloy body having an upper curved region containing a discharge footprint and a lower portion. In one aspect of an embodiment of the present invention, the upper region may include copper and the lower region may include a copper alloy. A portion of the electrode facing a gas discharge region may be formed in an arcuate shape extending into straight line portions on either side of the arcuate portion. The straight line portions may terminate in vertical straight sides.
Public/Granted literature
- US20040066827A1 Cathodes for fluorine gas discharge lasers Public/Granted day:2004-04-08
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