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US07096547B2 Manufacturing method of ceramic device using mixture with photosensitive resin 失效
陶瓷器件与感光树脂混合使用的制造方法

Manufacturing method of ceramic device using mixture with photosensitive resin
摘要:
A manufacturing method for a ceramic device using a mixture with a photosensitive resin includes: providing a ceramic substrate, forming a lower electrode on the substrate using a mixture of a photosensitive resin and metal, masking and exposing the lower electrode to pattern the lower electrode, forming a piezoelectric/electrostrictive layer on the lower electrode using a mixture of photosensitive resin and piezoelectric/electrostrictive ceramic, masking and exposing the piezoelectric/electrostrictive layer to pattern the piezoelectric/electrostrictive layer, forming an upper electrode on the piezoelectric/electrostrictive layer using the mixture of photosensitive resin and metal, and exposing the upper electrode to pattern the upper electrode.
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