发明授权
- 专利标题: Manufacturing method of ceramic device using mixture with photosensitive resin
- 专利标题(中): 陶瓷器件与感光树脂混合使用的制造方法
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申请号: US10688281申请日: 2003-10-17
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公开(公告)号: US07096547B2公开(公告)日: 2006-08-29
- 发明人: Sang Kyeong Yun , Dong Hoon Kim , Sung June Park
- 申请人: Sang Kyeong Yun , Dong Hoon Kim , Sung June Park
- 申请人地址: KR Kyungki-Do
- 专利权人: Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人: Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人地址: KR Kyungki-Do
- 代理机构: Darby & Darby
- 优先权: KR1999-28240 19990713
- 主分类号: H04R17/00
- IPC分类号: H04R17/00 ; H01L41/083 ; G03C5/00
摘要:
A manufacturing method for a ceramic device using a mixture with a photosensitive resin includes: providing a ceramic substrate, forming a lower electrode on the substrate using a mixture of a photosensitive resin and metal, masking and exposing the lower electrode to pattern the lower electrode, forming a piezoelectric/electrostrictive layer on the lower electrode using a mixture of photosensitive resin and piezoelectric/electrostrictive ceramic, masking and exposing the piezoelectric/electrostrictive layer to pattern the piezoelectric/electrostrictive layer, forming an upper electrode on the piezoelectric/electrostrictive layer using the mixture of photosensitive resin and metal, and exposing the upper electrode to pattern the upper electrode.
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