Invention Grant
- Patent Title: Transistor having three electrically isolated electrodes and method of formation
- Patent Title (中): 具有三个电隔离电极的晶体管和形成方法
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Application No.: US10705317Application Date: 2003-11-10
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Publication No.: US07098502B2Publication Date: 2006-08-29
- Inventor: Leo Mathew , Ramachandran Muralidhar
- Applicant: Leo Mathew , Ramachandran Muralidhar
- Applicant Address: US TX Austin
- Assignee: Freescale Semiconductor, Inc.
- Current Assignee: Freescale Semiconductor, Inc.
- Current Assignee Address: US TX Austin
- Agent Robert L. King; David G. Dolezal
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L27/12 ; H01L21/00 ; H01L21/336

Abstract:
A transistor (10) is formed having three separately controllable gates (44, 42, 18). The three gate regions may be electrically biased differently and the gate regions may have different conductivity properties. The dielectrics on the channel sidewall may be different than the dielectrics on the top of the channel. Electrical contacts to source, drain and the three gates is selectively made. By including charge storage layers, such as nanoclusters, adjacent the transistor channel and controlling the charge storage layers via the three gate regions, both volatile and non-volatile memory cells are realized using the same process to create a universal memory process. When implemented as a volatile cell, the height of the transistor and the characteristics of channel sidewall dielectrics control the memory retention characteristics. When implemented as a nonvolatile cell, the width of the transistor and the characteristics of the overlying channel dielectrics control the memory retention characteristics.
Public/Granted literature
- US20050098822A1 Transistor having three electrically isolated electrodes and method of formation Public/Granted day:2005-05-12
Information query
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