发明授权
- 专利标题: Magnetic support structure for an elevator tube of a vertical rapid thermal processing unit
- 专利标题(中): 垂直快速热处理装置的电梯管的磁支撑结构
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申请号: US10914343申请日: 2004-08-09
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公开(公告)号: US07100759B2公开(公告)日: 2006-09-05
- 发明人: Michel Pharand , Dennis Normandin , Ari Eiriksson
- 申请人: Michel Pharand , Dennis Normandin , Ari Eiriksson
- 申请人地址: US MA Beverly
- 专利权人: Axcelis Technologies, Inc.
- 当前专利权人: Axcelis Technologies, Inc.
- 当前专利权人地址: US MA Beverly
- 代理机构: Watts Hoffmann Co., LPA
- 主分类号: B65G35/00
- IPC分类号: B65G35/00
摘要:
A vertical rapid thermal processing system includes a processing chamber and an elevator structure providing for vertical movement of a workpiece within the processing chamber. The elevator structure includes a workpiece support for supporting the workpiece and an elevator shaft coupled to the workpiece support and extending externally from the processing chamber. An end portion of the elevator shaft, external to the processing chamber, has a selected magnetic polarity. The elevator structure also includes moveable carriage coupled to the shaft to provide vertical movement of the workpiece within the processing chamber. The carriage includes a shaft support having the selected polarity. The shaft support is positioned adjacent the polarized end portion of the elevator shaft such that repulsive magnetic forces maintain a gap between the end portion of the elevator shaft and the shaft support as the shaft support and elevator shaft move vertically along a path of travel.
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