发明授权
- 专利标题: Nitride semiconductor device and method of manufacturing the same
- 专利标题(中): 氮化物半导体器件及其制造方法
-
申请号: US11074413申请日: 2005-03-08
-
公开(公告)号: US07102173B2公开(公告)日: 2006-09-05
- 发明人: Gyu-Chul Yi , Sung Jin An , Yong Jin Kim
- 申请人: Gyu-Chul Yi , Sung Jin An , Yong Jin Kim
- 申请人地址: KR Gyeongsangbuk-Do KR Pohang-Shi
- 专利权人: Siltron Inc.,Postech Foundation
- 当前专利权人: Siltron Inc.,Postech Foundation
- 当前专利权人地址: KR Gyeongsangbuk-Do KR Pohang-Shi
- 代理机构: Marshall, Gerstein & Borun LLP
- 优先权: KR10-2004-0016093 20040310; KR10-2005-0012854 20050216
- 主分类号: H01L31/296
- IPC分类号: H01L31/296
摘要:
Provided are a nitride semiconductor device and method of manufacturing the same. In the method, semiconductor nanorods are vertically grown on a substrate, and then a nitride semiconductor thin film is deposited on the substrate having the semiconductor nanorods. Accordingly, a high-quality nitride semiconductor thin film can be deposited on a variety of inexpensive, large-sized substrates. Also, because the nitride semiconductor thin film containing the semiconductor nanorods can easily emit light through openings between the nanorods, internal scattering can be greatly reduced. Thus, the nitride semiconductor thin film can be usefully employed in optical devices such as light emitting diodes and electronic devices.
公开/授权文献
信息查询