发明授权
US07103861B2 Test structure for automatic dynamic negative-bias temperature instability testing
有权
自动动态负偏置温度不稳定性测试的测试结构
- 专利标题: Test structure for automatic dynamic negative-bias temperature instability testing
- 专利标题(中): 自动动态负偏置温度不稳定性测试的测试结构
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申请号: US10864951申请日: 2004-06-10
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公开(公告)号: US07103861B2公开(公告)日: 2006-09-05
- 发明人: Chew Hoe Ang , Gang Chen , Shyue Seng Tan
- 申请人: Chew Hoe Ang , Gang Chen , Shyue Seng Tan
- 申请人地址: SG Singapore
- 专利权人: Chartered Semiconductor Manufacturing Ltd.
- 当前专利权人: Chartered Semiconductor Manufacturing Ltd.
- 当前专利权人地址: SG Singapore
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
The invention describes a novel test structure and process to create the structure for performing automatic dynamic stress testing of PMOS devices for Negative Bias Temperature Instability (NBTI). The invention consists of an integrated inverter, two integrated electronic switches for switching from stress mode to device DC characterization measurement mode, and a PMOS FET device under test (DUT). The inverter assures the proper 180 degree phase relationship between the test device source and gate voltage while the imbedded electronic switches provide isolation of the test device during DC characterization testing. Another embodiment of the invention enables the testing of multiple devices under test (DUT's).
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