发明授权
- 专利标题： Radiation detecting device and method of manufacturing the same
- 专利标题（中）： 辐射检测装置及其制造方法
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申请号： US10795352申请日： 2004-03-09
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公开(公告)号： US07105830B2公开(公告)日： 2006-09-12
- 发明人: Kazumi Nagano , Tomoyuki Tamura , Satoshi Okada , Katsuro Takenaka
- 申请人： Kazumi Nagano , Tomoyuki Tamura , Satoshi Okada , Katsuro Takenaka
- 申请人地址： JP Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 代理机构： Fitzpatrick, Cella, Harper & Scinto
- 优先权： JP2003-066728 20030312
- 主分类号： G01T1/20
- IPC分类号： G01T1/20
摘要：
In a radiation detecting device having a sensor panel in which a plurality of photoelectric conversion elements are formed on one surface of a support substrate, a moisture-proof protective layer is laminated on a surface of the sensor panel on which the photoelectric conversion elements are formed, and a warp correction layer is laminated on the other surface of the sensor panel, and the moisture-proof protective layer and the warp correction layer are formed of a resin film having a drawing or extrusion direction, respectively, and bonded together so as to make the drawing or extrusion directions of both the resin films similar to each other. With the formation of the radiation detecting device, the warp of the radiation detection panel induced by a thermal displacement is prevented.
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