发明授权
US07106832B2 Apparatus including a radiation source, a filter system for filtering particles out of radiation emitted by the source, and a processing system for processing the radiation, a lithographic apparatus including such an apparatus, and a method of filtering particles out of radiation emitting and propagating from a radiation source
有权
包括辐射源的装置，用于从源发射的辐射中过滤颗粒的过滤系统，以及用于处理辐射的处理系统，包括这种装置的光刻设备，以及从发射和传播辐射的辐射中过滤颗粒的方法 辐射源
- 专利标题： Apparatus including a radiation source, a filter system for filtering particles out of radiation emitted by the source, and a processing system for processing the radiation, a lithographic apparatus including such an apparatus, and a method of filtering particles out of radiation emitting and propagating from a radiation source
- 专利标题（中）： 包括辐射源的装置，用于从源发射的辐射中过滤颗粒的过滤系统，以及用于处理辐射的处理系统，包括这种装置的光刻设备，以及从发射和传播辐射的辐射中过滤颗粒的方法 辐射源
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申请号： US11031535申请日： 2005-01-10
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公开(公告)号： US07106832B2公开(公告)日： 2006-09-12
- 发明人: Derk Jan Wilfred Klunder , Levinus Pieter Bakker , Vadim Yevgenyevich Banine , Maarten Marinus Johannes Wilhelmus Van Herpen
- 申请人： Derk Jan Wilfred Klunder , Levinus Pieter Bakker , Vadim Yevgenyevich Banine , Maarten Marinus Johannes Wilhelmus Van Herpen
- 申请人地址： NL Veldhoven
- 专利权人： ASML Netherlands B.V.
- 当前专利权人： ASML Netherlands B.V.
- 当前专利权人地址： NL Veldhoven
- 代理机构： Pillsbury Winthrop Shaw Pittman, LLP
- 主分类号： G21K3/00
- IPC分类号： G21K3/00
摘要：
Particles emitted by a radiation source, and moving from the radiation source towards a processing system for processing the radiation from the radiation source, are filtered out of radiation propagating through a predetermined cross section of the radiation as emitted by the radiation source by a filter system. The filter system includes a plurality of foils and a transporter for transporting the foils along a trajectory which extends within the beam so that the foils intercept the particles within the beam. The transporter is arranged to transport the foils by a substantially translatory movement of the foils along at least a part of the trajectory.
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