Invention Grant
US07107848B2 Active scan velocity control for torsional hinged MEMS scanner
有权
用于扭转铰链式MEMS扫描仪的主动扫描速度控制
- Patent Title: Active scan velocity control for torsional hinged MEMS scanner
- Patent Title (中): 用于扭转铰链式MEMS扫描仪的主动扫描速度控制
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Application No.: US11004457Application Date: 2004-12-03
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Publication No.: US07107848B2Publication Date: 2006-09-19
- Inventor: Arthur Monroe Turner
- Applicant: Arthur Monroe Turner
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent William B Kempler; W. James Brady; Frederick J. Telecky, Jr.
- Main IPC: G01N29/036
- IPC: G01N29/036
Abstract:
System and method for adjusting an operational parameter of a component that drifts with temperature changes. The system includes a torsional hinged device that oscillates at a resonant frequency, and the resonant frequency of the device drifts or varies with temperature. Differences of a selected parameter between a drive signal and the actual selected parameter are monitored to determine changes in the resonant frequency. An output signal representative of change in the resonant frequency is used to adjust another component that also has a parameter that varies with temperature changes. The adjustment compensates for the temperature drift.
Public/Granted literature
- US20060117854A1 Active scan velocity control for torsional hinged MEMS scanner Public/Granted day:2006-06-08
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