发明授权
- 专利标题: Optical ready substrates
- 专利标题(中): 光学就绪基板
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申请号: US10623666申请日: 2003-07-21
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公开(公告)号: US07110629B2公开(公告)日: 2006-09-19
- 发明人: Claes Bjorkman , Lawrence C. West , Dan Maydan , Samuel Broydo
- 申请人: Claes Bjorkman , Lawrence C. West , Dan Maydan , Samuel Broydo
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Wilmer Cutler Pickering Hale & Dorr LLP
- 主分类号: G02B6/12
- IPC分类号: G02B6/12
摘要:
An article of manufacture comprising an optical-ready substrate made of a first semiconductor layer, an insulating layer on top of the first semiconductor layer, and a second semiconductor layer on top of the insulating layer, wherein the second semiconductor layer has a top surface and is laterally divided into two regions including a first region and a second region, the top surface of the first region being of a quality that is sufficient to permit microelectronic circuitry to be formed therein and the second region including an optical signal distribution circuit formed therein, the optical signal distribution circuit made up of interconnected semiconductor photonic elements and designed to provide signals to the microelectronic circuit to be fabricated in the first region of the second semiconductor layer.
公开/授权文献
- US20040114853A1 Optical ready substrates 公开/授权日:2004-06-17
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