发明授权
- 专利标题: Microfabrication of pattern imprinting
- 专利标题(中): 图案压印的微加工
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申请号: US10699873申请日: 2003-11-04
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公开(公告)号: US07115354B2公开(公告)日: 2006-10-03
- 发明人: Masahiro Hatakeyama , Katsunori Ichiki , Tohru Satake , Yotaro Hatamura , Masayuki Nakao
- 申请人: Masahiro Hatakeyama , Katsunori Ichiki , Tohru Satake , Yotaro Hatamura , Masayuki Nakao
- 申请人地址: JP Tokyo JP Tokyo
- 专利权人: Ebara Corporation,Yotaro Hatamura
- 当前专利权人: Ebara Corporation,Yotaro Hatamura
- 当前专利权人地址: JP Tokyo JP Tokyo
- 代理机构: Wenderoth, Lind & Ponack, L.L.P.
- 优先权: JP10-136145 19980430; JP10-136146 19980430; JP10-136149 19980430; JP10-136150 19980430; JP10-136153 19980430
- 主分类号: G01F9/00
- IPC分类号: G01F9/00 ; G03C5/00
摘要:
An optical imprinting apparatus, and a method for producing a two-dimensional pattern, have line widths less than the wavelength of an exposure light. The evanescent (proximity) field effect is adopted to realize the apparatus and method. An optical imprinting apparatus comprises a container in which light is enclosed, an exposure-mask having a proximity field exposure pattern firmly fixed to a section of the container for exposing the exposure pattern on a photo-sensitive material through an evanescent field by the light enclosed therein; and a light source for supplying the light in the container.
公开/授权文献
- US20040090610A1 Microfabrication of pattern imprinting 公开/授权日:2004-05-13
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