发明授权
- 专利标题: Electron beam device having a specimen holder
- 专利标题(中): 具有试样架的电子束装置
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申请号: US10895629申请日: 2004-07-21
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公开(公告)号: US07119344B2公开(公告)日: 2006-10-10
- 发明人: Stephan Hiller , Richard König , Harald Niebel
- 申请人: Stephan Hiller , Richard König , Harald Niebel
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss NTS GmbH
- 当前专利权人: Carl Zeiss NTS GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Muirhead & Saturnelli, LLC
- 优先权: DE10335504 20030731
- 主分类号: H01J37/20
- IPC分类号: H01J37/20
摘要:
An electron beam device having a specimen holder, in particular for a transmission electron microscope (TEM), which makes it possible to identify the specimen holder in a simple manner is described. Therefore, the electron beam device has at least one specimen holder having at least one holding element for holding a specimen and at least one identification unit. Furthermore, the electron beam device has a reading unit for reading the identification unit without contact, a goniometer, into which the specimen holder may be inserted, and a controller for controlling the movement modes of the goniometer, via which the movement modes of the goniometer are controlled on the basis of the identification data supplied by the identification unit and of corresponding data stored in the controller.
公开/授权文献
- US20050199810A1 Electron beam device having a specimen holder 公开/授权日:2005-09-15
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