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US07119945B2 Altering temporal response of microelectromechanical elements 有权
改变微机电元件的时间响应

Altering temporal response of microelectromechanical elements
Abstract:
An array of movable elements is arranged on a substrate. Each element has a cavity and a movable member to move through the cavity. The pressure resistance of the elements varies, allowing actuation signals to be manipulated to activate elements with different pressure resistance at different levels of the actuation signal.
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