发明授权
US07125537B2 Method for manufacturing nanopowders of oxide through DC plasma thermal reaction
有权
通过DC等离子体热反应制备氧化物纳米粉末的方法
- 专利标题: Method for manufacturing nanopowders of oxide through DC plasma thermal reaction
- 专利标题(中): 通过DC等离子体热反应制备氧化物纳米粉末的方法
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申请号: US11024404申请日: 2004-12-30
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公开(公告)号: US07125537B2公开(公告)日: 2006-10-24
- 发明人: Shih-Chieh Liao , Song-Wein Hong , Hsiu-Fen Lin
- 申请人: Shih-Chieh Liao , Song-Wein Hong , Hsiu-Fen Lin
- 申请人地址: TW
- 专利权人: Industrial Technology Research Institute
- 当前专利权人: Industrial Technology Research Institute
- 当前专利权人地址: TW
- 代理机构: Lowe Hauptman & Berner LLP
- 优先权: TW93104176A 20040220
- 主分类号: C01B13/20
- IPC分类号: C01B13/20
摘要:
A method for manufacturing powders of oxides in a nanometer level through a direct current plasma thermal reaction is disclosed. The energy required is provided by the plasma that is generated in the non-transferred DC plasma apparatus. Once the solid precursors are introduced into the plasma, the solid precursors are vaporized and oxidized in the plasma reaction region of the non-transferred DC plasma apparatus continuously. Then, the oxide powders in a nanometer scale can form homogeneously and continuously. By controlling the nozzle size, the speed of the plasma can be adjusted and the coarsening and agglomeration of the nanopowders can be effectively prevented. Finally, oxide nanopowders of high-purity and high-dispersity are obtained by cooling down the plasma gas containing the vaporized and oxidized precursor through a vortical cooling-gas.
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