发明授权
- 专利标题： Device and method of positionally accurate implantation of individual particles in a substrate surface
- 专利标题（中）： 将单个颗粒定位在衬底表面中的装置和方法
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申请号： US10683488申请日： 2003-10-09
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公开(公告)号： US07126139B2公开(公告)日： 2006-10-24
- 发明人: Thomas Schenkel , Ivo W. Rangelow , Jan Meijer
- 申请人： Thomas Schenkel , Ivo W. Rangelow , Jan Meijer
- 申请人地址： US CA Oakland
- 专利权人： The Regents of the University of California
- 当前专利权人： The Regents of the University of California
- 当前专利权人地址： US CA Oakland
- 代理机构： National Laboratory
- 代理商 Michelle Chew Wong; Lawrence Berkeley
- 主分类号： G02B6/26
- IPC分类号： G02B6/26 ; H01J37/00
摘要：
A device and a method for positionally accurate implantation of individual particles in a substrate surface (1a) are described. A diaphragm for a particle beam to be directed onto the substrate surface (1a) and a detector provided thereon in the form of a p-n junction for determining a secondary electron flow produced upon impact of a particle onto the substrate surface (1a) are provided on a tip (4) which is formed on a free end portion of a flexible arm (2) to be mounted on one side. The device is part of a scanning device operating according to the AFM method.