发明授权
- 专利标题: Piezoelectric vibration gyro element, method for manufacturing the same, and piezoelectric vibration gyro sensor
- 专利标题(中): 压电振动陀螺元件及其制造方法以及压电振动陀螺传感器
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申请号: US10852606申请日: 2004-05-25
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公开(公告)号: US07126262B2公开(公告)日: 2006-10-24
- 发明人: Osamu Kawauchi , Koji Watanabe
- 申请人: Osamu Kawauchi , Koji Watanabe
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff & Berridge, PLC
- 优先权: JP2003-159720 20030604; JP2004-093764 20040326
- 主分类号: G01C19/56
- IPC分类号: G01C19/56
摘要:
The invention provides a piezoelectric vibration gyro element including a pair of detecting resonant arms at its center, connecting arms each on, the right and left of the center, and a pair of driving resonant arms at each far end of the connecting arms, which makes it possible to secure the symmetry of the resonant arms' flexure and vibrating, and easily and accurately separate electrodes. In particular, two side surfaces of extension parts that extend along the direction in which each end surface of connecting arms extends, flat surfaces are provided to both sides in a direction perpendicular to the direction in which driving resonant arms extend. A wiring passing across the end surface of the extension parts in its thickness direction and joining front and back main surfaces of the end surface of the connecting arms and the extension parts can be formed so as to electrically couple the first driving electrodes each on the front and back main surfaces of the driving resonant arms. The exposure for electrode separation can be done from the above in a direction perpendicular to the flat surface of the extension part and with a given angle to the main surfaces of the driving resonant arms so as to simultaneously expose the main surfaces and side surfaces to light.
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