发明授权
- 专利标题: Single axis light pipe for homogenizing slow axis of illumination systems based on laser diodes
- 专利标题(中): 基于激光二极管的照明系统慢轴均匀单轴光管
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申请号: US11185649申请日: 2005-07-20
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公开(公告)号: US07129440B2公开(公告)日: 2006-10-31
- 发明人: Bruce E. Adams , Dean Jennings , Abhilash J. Mayur , Vijay Parihar , Joseph M. Ranish
- 申请人: Bruce E. Adams , Dean Jennings , Abhilash J. Mayur , Vijay Parihar , Joseph M. Ranish
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Law Office of Robert M. Wallace
- 主分类号: B23K26/06
- IPC分类号: B23K26/06 ; G02B6/10
摘要:
Apparatus for thermally processing a semiconductor wafer includes an array of semiconductor laser emitters arranged in plural parallel rows extending along a slow axis, plural respective cylindrical lenses overlying respective ones of the rows of laser emitters for collimating light from the respective rows along a fast axis generally perpendicular to the slow axis, a homogenizing light pipe having an input face at a first end for receiving light from the plural cylindrical lenses and an output face at an opposite end, the light pipe comprising a pair of reflective walls extending between the input and output faces and separated from one another along the direction of the slow axis, and scanning apparatus for scanning light emitted from the homogenizing light pipe across the wafer in a scanning direction parallel to the fast axis.