发明授权
US07129641B2 Display device having a thin film electron source array 有权
具有薄膜电子源阵​​列的显示装置

  • 专利标题: Display device having a thin film electron source array
  • 专利标题(中): 具有薄膜电子源阵​​列的显示装置
  • 申请号: US10724149
    申请日: 2003-12-01
  • 公开(公告)号: US07129641B2
    公开(公告)日: 2006-10-31
  • 发明人: Toshiaki KusunokiMasakazu SagawaMutsumi Suzuki
  • 申请人: Toshiaki KusunokiMasakazu SagawaMutsumi Suzuki
  • 申请人地址: JP Tokyo
  • 专利权人: Hitachi, Ltd.
  • 当前专利权人: Hitachi, Ltd.
  • 当前专利权人地址: JP Tokyo
  • 代理机构: Reed Smith LLP
  • 代理商 Stanley P. Fisher, Esq.; Juan Carlos A. Marquez, Esq.
  • 优先权: JP2002-375855 20021226; JP2003-135267 20030514; JP2003-135268 20030514; JP2003-135269 20030514; JP2003-354161 20031014
  • 主分类号: G09G3/10
  • IPC分类号: G09G3/10
Display device having a thin film electron source array
摘要:
The invention provides a display device using thin film type electron sources having a structure that can be formed in a simple manufacturing process. A lower electrode, a protective insulating layer and an interlayer film are formed on a cathode substrate. An upper bus electrode made from a laminated film of a metal film lower layer and a metal film upper layer is provided further on the interlayer film. A film of an upper electrode of a thin film type electron source for each pixel constituted by an insulating layer serving as an electron accelerating layer on the lower electrode and the upper electrode is formed on two stripe electrodes of the upper bus electrode in that pixel and another upper bus electrode in an adjacent pixel by sputtering. Then, the upper electrode is separated by self-alignment due to a setback portion of the metal film lower layer and an appentice of the metal film upper layer of the corresponding upper bus electrode. Thus, a thin film type electron source separated in accordance with each pixel is formed.
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