发明授权
- 专利标题: Vacuum evaporator
- 专利标题(中): 真空蒸发器
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申请号: US10879584申请日: 2004-06-30
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公开(公告)号: US07131392B2公开(公告)日: 2006-11-07
- 发明人: Katuhiko Shimojima , Hirofumi Fujii , Hiroshi Kawaguchi
- 申请人: Katuhiko Shimojima , Hirofumi Fujii , Hiroshi Kawaguchi
- 申请人地址: JP Kobe
- 专利权人: Kobe Steel, Ltd.
- 当前专利权人: Kobe Steel, Ltd.
- 当前专利权人地址: JP Kobe
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权: JP2003-271248 20030707
- 主分类号: C23C14/32
- IPC分类号: C23C14/32 ; C23C14/24 ; C23C14/56
摘要:
A vacuum evaporator according to the present invention comprises a vacuum chamber, a rod-like evaporation source provided to be liftable into and out of the vacuum chamber, and a work support means for supporting, relative to the evaporation source lowered into the vacuum chamber, works W arranged to surround the evaporation source. The vacuum chamber is formed of a fixed chamber part and a movable chamber part provided connectably to and disconnectably from the fixed chamber part and mounted with the work support means. Either one movable chamber part is horizontally moved and connected to the fixed chamber part in the state where the evaporation source is raised and retreated out of the vacuum chamber to perform vacuum evaporation treatment. According to such a structure, the maintenance of the vacuum evaporator can be performed without raising or lowering the lower plate or taking out the work support means from the vacuum chamber.
公开/授权文献
- US20050005860A1 Vacuum evaporator 公开/授权日:2005-01-13
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