发明授权
US07132656B2 High speed and high efficiency Si-based photodetectors using waveguides formed with silicide for near IR applications
失效
使用由硅化物形成的波导用于近红外应用的高速和高效Si基光电探测器
- 专利标题: High speed and high efficiency Si-based photodetectors using waveguides formed with silicide for near IR applications
- 专利标题(中): 使用由硅化物形成的波导用于近红外应用的高速和高效Si基光电探测器
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申请号: US10943992申请日: 2004-09-20
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公开(公告)号: US07132656B2公开(公告)日: 2006-11-07
- 发明人: Dan-Xia Xu , Siegfried Janz
- 申请人: Dan-Xia Xu , Siegfried Janz
- 申请人地址: CA Ottawa
- 专利权人: National Research Council of Canada
- 当前专利权人: National Research Council of Canada
- 当前专利权人地址: CA Ottawa
- 代理机构: Marks & Clerk
- 代理商 S. Mark Budd
- 主分类号: H01L31/00
- IPC分类号: H01L31/00
摘要:
According to this invention, silicon-based photodetectors using waveguides formed with silicide regions can have high speed and high efficiency for near IR applications. Utilizing the unique properties of silicides, the proposed method provides a simple and elegant way to implement a photodetector design in which photogenerated carriers travel perpendicular to the direction of light propagation. Therefore, the speed and quantum efficiency of the photodetector may be optimized independently. This device configuration may be implemented in one of the two approaches: (a) waveguides formed through surface silicidation of a silicon-based layer of a substrate (b) waveguides formed through silicidation of ridge waveguide side-walls of a silicon-based layer of a substrate; The use of mature silicon technology promises low cost of production and other benefits.