发明授权
US07133187B2 AOM modulation techniques employing plurality of transducers to improve laser system performance
有权
使用多个换能器的AOM调制技术来改善激光系统性能
- 专利标题： AOM modulation techniques employing plurality of transducers to improve laser system performance
- 专利标题（中）： 使用多个换能器的AOM调制技术来改善激光系统性能
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申请号： US11138076申请日： 2005-05-25
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公开(公告)号： US07133187B2公开(公告)日： 2006-11-07
- 发明人: Jay Johnson
- 申请人： Jay Johnson
- 申请人地址： US OR Portland
- 专利权人： Electro Scientific Industries, Inc.
- 当前专利权人： Electro Scientific Industries, Inc.
- 当前专利权人地址： US OR Portland
- 代理机构： Stoel Rives LLP
- 主分类号： G02F1/33
- IPC分类号： G02F1/33 ; B23K26/08 ; B23K26/04 ; G02F1/11
摘要：
Digital control of frequency and/or amplitude modulation techniques of an intracavity and/or extracavity AOM (60) facilitate substantially full extinction of a laser beam (90) to prevent unwanted laser energy from impinging a workpiece (80); facilitate laser pulse amplitude stability through closed-loop control of pulse-to-pulse laser energy; facilitate beam-positioning control including, but not limited to, closed-loop control for applications such as alignment error correction, beam walk rectification, or tertiary positioning; and facilitate employment of more than one transducer on an AOM (60) to perform any of the above-listed applications.