发明授权
US07134187B2 Method for making an inkjet-head chip structure 有权
制造喷墨头芯片结构的方法

Method for making an inkjet-head chip structure
摘要:
A structure of inkjet-head chip and a method for making the same are disclosed. Driven by the need of making a thin insulator layer to lower the working power of the inkjet-head chip, we separately manufacture a passivation layer and a second conductive layer. The passivation layer and the second conductive layer have to be formed from different materials. The defining means for the passivation layer and the second conductive layer have high selectivity and do not overetch or damage the structure of inkjet-head chip.
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