Invention Grant
- Patent Title: Transfer apparatus
- Patent Title (中): 转运设备
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Application No.: US10863099Application Date: 2004-06-07
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Publication No.: US07134222B2Publication Date: 2006-11-14
- Inventor: Geun-Soo An , Gi-Cheon Yoon
- Applicant: Geun-Soo An , Gi-Cheon Yoon
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: MacPherson Kwok Chen & Heid LLP
- Priority: KR10-2003-0057851 20030821
- Main IPC: F26B7/00
- IPC: F26B7/00

Abstract:
A transfer apparatus is provided for the transport of transfer objects such as glass substrates or semiconductor devices in which cleanliness and secure transport are of major concern. A plurality of air nozzles inject air through the plurality of air nozzles to hold a transfer object in place above or below the plurality of air nozzles without the plurality of air nozzles making contact with the transfer object. The plurality of air nozzles are positioned perpendicular to the transfer object to stop and/or engage the transfer object in a rest position. The plurality of air nozzles are inclined to a specified angle to move the transferred object in a desired direction. Advantageously, because the transfer object is moved without physical contact between the structure of the air nozzles and the transfer object, the transfer is secure, clean, and efficient.
Public/Granted literature
- US20050050752A1 Transfer apparatus Public/Granted day:2005-03-10
Information query
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