发明授权
- 专利标题: Gas flow measuring device and gas flow measuring method
- 专利标题(中): 气体流量测量装置和气体流量测量方法
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申请号: US10967214申请日: 2004-10-19
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公开(公告)号: US07140260B2公开(公告)日: 2006-11-28
- 发明人: Hiroshi Okuda , Akiko Kuse
- 申请人: Hiroshi Okuda , Akiko Kuse
- 申请人地址: JP Osaka
- 专利权人: Espec Corp.
- 当前专利权人: Espec Corp.
- 当前专利权人地址: JP Osaka
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: JP2003-373110 20031031
- 主分类号: G01N3/08
- IPC分类号: G01N3/08
摘要:
The present invention realizes (i) a gas flow measuring device which can measure a gas flow of a low-boiling gas in a mixed gas including two types of gasses having different boiling points, and (ii) a method of measuring a gas flow easily but highly precisely, using the gas flow measuring device. The gas flow measuring device includes a condensing tank for condensing a mixed gas in which two types of gasses having different boiling points are mixed with each other, and a flow meter for measuring the flow of the mixed gas. After condensing the mixed gas in the condensing tank so as to cause the gas flow of the high-boiling gas to be known, the flow is measured using the flow meter so that the gas flow of the low-boiling gas is worked out.
公开/授权文献
- US20050092099A1 Gas flow measuring device and gas flow measuring method 公开/授权日:2005-05-05