Invention Grant
- Patent Title: Gas flow measuring device and gas flow measuring method
- Patent Title (中): 气体流量测量装置和气体流量测量方法
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Application No.: US10967214Application Date: 2004-10-19
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Publication No.: US07140260B2Publication Date: 2006-11-28
- Inventor: Hiroshi Okuda , Akiko Kuse
- Applicant: Hiroshi Okuda , Akiko Kuse
- Applicant Address: JP Osaka
- Assignee: Espec Corp.
- Current Assignee: Espec Corp.
- Current Assignee Address: JP Osaka
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2003-373110 20031031
- Main IPC: G01N3/08
- IPC: G01N3/08

Abstract:
The present invention realizes (i) a gas flow measuring device which can measure a gas flow of a low-boiling gas in a mixed gas including two types of gasses having different boiling points, and (ii) a method of measuring a gas flow easily but highly precisely, using the gas flow measuring device. The gas flow measuring device includes a condensing tank for condensing a mixed gas in which two types of gasses having different boiling points are mixed with each other, and a flow meter for measuring the flow of the mixed gas. After condensing the mixed gas in the condensing tank so as to cause the gas flow of the high-boiling gas to be known, the flow is measured using the flow meter so that the gas flow of the low-boiling gas is worked out.
Public/Granted literature
- US20050092099A1 Gas flow measuring device and gas flow measuring method Public/Granted day:2005-05-05
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