- 专利标题: Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
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申请号: US11324038申请日: 2005-12-29
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公开(公告)号: US07140956B1公开(公告)日: 2006-11-28
- 发明人: Nikolay N. Korovin , Stephen C. Schultz , John D. Herb , James L. Farmer
- 申请人: Nikolay N. Korovin , Stephen C. Schultz , John D. Herb , James L. Farmer
- 申请人地址: US AZ Chandler
- 专利权人: Speedfam-Ipec Corporation
- 当前专利权人: Speedfam-Ipec Corporation
- 当前专利权人地址: US AZ Chandler
- 代理机构: Ingrassia Fisher & Lorenz, P.C.
- 主分类号: B24B20/00
- IPC分类号: B24B20/00
摘要:
An apparatus for planarizing a work piece includes an easily assembled work carrier. The carrier includes a carrier insert having a work piece bladder clamped to a carrier backing plate with a plurality of clamps to form a plurality of web plenums. The outer edge of the bladder is supported by a rib that is coupled to a carrier plenum. By adjusting the pressure in the carrier plenum, the pressure exerted on the edge of a work piece during a planarization operation can be adjusted. The carrier also includes a floating wear ring that surrounds the work piece bladder and a work piece mounted on that bladder. By adjusting the force exerted by the wear ring on a polishing pad, independently of the pressure exerted by the rib at the edge of the bladder, the material removal rate near the edge of the work piece can be controlled.
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