发明授权
- 专利标题： Vertically aligned nanostructure scanning probe microscope tips
- 专利标题（中）： 垂直取向的纳米结构扫描探针显微镜技巧
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申请号： US10716770申请日： 2003-11-19
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公开(公告)号： US07151256B2公开(公告)日： 2006-12-19
- 发明人: Michael A. Guillorn , Bojan Ilic , Anatoli V. Melechko , Vladimir I. Merkulov , Douglas H. Lowndes , Michael L. Simpson
- 申请人： Michael A. Guillorn , Bojan Ilic , Anatoli V. Melechko , Vladimir I. Merkulov , Douglas H. Lowndes , Michael L. Simpson
- 申请人地址： US TN Oak Ridge
- 专利权人： UT-Battelle, LLC
- 当前专利权人： UT-Battelle, LLC
- 当前专利权人地址： US TN Oak Ridge
- 代理商 John Bruckner PC
- 主分类号： G12B21/02
- IPC分类号： G12B21/02 ; G01N13/16 ; G01B5/28 ; G01B7/34
摘要：
Methods and apparatus are described for cantilever structures that include a vertically aligned nanostructure, especially vertically aligned carbon nanofiber scanning probe microscope tips. An apparatus includes a cantilever structure including a substrate including a cantilever body, that optionally includes a doped layer, and a vertically aligned nanostructure coupled to the cantilever body.