Invention Grant
- Patent Title: Apparatus and method of controlling single-input-multi-output systems
- Patent Title (中): 控制单输入多输出系统的装置和方法
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Application No.: US10916084Application Date: 2004-08-11
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Publication No.: US07152052B2Publication Date: 2006-12-19
- Inventor: George Shu-Xing Cheng
- Applicant: George Shu-Xing Cheng
- Agency: DLA Piper US LLP
- Agent Peter R. Leal
- Main IPC: G05B13/02
- IPC: G05B13/02

Abstract:
An apparatus and method is disclosed for automatically controlling single-input-multi-output (SIMO) systems or processes. The control output signals of a plurality of single-input-single-output (SISO) automatic controllers are combined by a combined output setter so that these SISO controllers are converted to a multi-input-single-output (MISO) automatic controller based on certain criteria; and its resulting controller output signal is able to manipulate only one actuator to control a plurality of continuous process variables or attempt to minimize a plurality of error signals between the setpoints and their corresponding process variables. Without the need of building process mathematical models, this inventive apparatus and method is useful for automatically controlling unevenly paired multivariable systems or processes where there are less system inputs than outputs including but not limited to industrial furnaces, rapid thermal processing (RTP) chambers, chemical mechanical planarization (CMP) systems, and distillation columns.
Public/Granted literature
- US20050038532A1 Apparatus and method of controlling single-input-multi-output systems Public/Granted day:2005-02-17
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