发明授权
US07157287B2 Method of substrate surface treatment for RRAM thin film deposition
有权
RRAM薄膜沉积的基板表面处理方法
- 专利标题: Method of substrate surface treatment for RRAM thin film deposition
- 专利标题(中): RRAM薄膜沉积的基板表面处理方法
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申请号: US10855088申请日: 2004-05-27
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公开(公告)号: US07157287B2公开(公告)日: 2007-01-02
- 发明人: Wei-Wei Zhuang , Tingkai Li , Wei Pan , David R. Evans , Sheng Teng Hsu
- 申请人: Wei-Wei Zhuang , Tingkai Li , Wei Pan , David R. Evans , Sheng Teng Hsu
- 申请人地址: US WA Camas
- 专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人地址: US WA Camas
- 代理商 Robert D. Varitz, PC
- 主分类号: H01L21/20
- IPC分类号: H01L21/20
摘要:
A method of fabricating a CMR thin film for use in a semiconductor device includes preparing a CMR precursor in the form of a metal acetate based acetic acid solution; preparing a wafer; placing a wafer in a spin-coating chamber; spin-coating and heating the wafer according to the following: injecting the CMR precursor into a spin-coating chamber and onto the surface of the wafer in the spin-coating chamber; accelerating the wafer to a spin speed of between about 1500 RPM to 3000 RPM for about 30 seconds; baking the wafer at a temperature of about 180° C. for about one minute; ramping the temperature to about 230° C.; baking the wafer for about one minute at the ramped temperature; annealing the wafer at about 500° C. for about five minutes; repeating said spin-coating and heating steps at least three times; post-annealing the wafer at between about 500° C. to 600° C. for between about one to six hours in dry, clean air; and completing the semiconductor device.
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