发明授权
- 专利标题: Shallow trench isolation and method of forming the same
- 专利标题(中): 浅沟槽隔离及其形成方法
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申请号: US10969348申请日: 2004-10-19
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公开(公告)号: US07160789B2公开(公告)日: 2007-01-09
- 发明人: Jong-Chul Park
- 申请人: Jong-Chul Park
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Marger Johnson & McCollom, P. C.
- 优先权: KR10-2003-0073836 20031022
- 主分类号: H01L21/76
- IPC分类号: H01L21/76
摘要:
A shallow trench isolation (STI) structure and a method of forming the STI structure. The STI structure defines an active region formed with a recess channel transistor. The STI structure includes a STI trench has a laterally curved rounding portion on the bottom of the recess channel trench. In order to form the STI trench with the rounding portion, a semiconductor substrate is selectively and anisotropically dry etched to form the trench. Then, the semiconductor substrate is isotropically etched around the bottom height of the recess channel trench to form the rounding portion, and then further anisotropically dry etched, thereby forming the STI trench. After an insulating layer that fill the STI trench is formed on the resultant structure, an upper surface of the resultant structure is planarized to expose a surface of the semiconductor substrate.
公开/授权文献
- US20050087832A1 Shallow trench isolation and method of forming the same 公开/授权日:2005-04-28