发明授权
US07161447B2 Piezoelectric resonator, piezoelectric filter, and communication apparatus 有权
压电谐振器,压电滤波器和通信装置

Piezoelectric resonator, piezoelectric filter, and communication apparatus
摘要:
A piezoelectric resonator includes a supporting substrate having an opening or a concavity, a vibrating section in which at least one pair of an upper electrode and a lower electrode oppose each other so as to sandwich an upper surface and a lower surface of at least one layer of piezoelectric thin film, the vibrating portion being formed over the opening or the concavity, and a heat dissipating film disposed over at least one of the upper electrode and the piezoelectric thin film so as not to cover the vibrating section.
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