发明授权
- 专利标题: Piezoelectric resonator, piezoelectric filter, and communication apparatus
- 专利标题(中): 压电谐振器,压电滤波器和通信装置
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申请号: US10656246申请日: 2003-09-08
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公开(公告)号: US07161447B2公开(公告)日: 2007-01-09
- 发明人: Tadashi Nomura , Hajime Yamada , Ryuichi Kubo
- 申请人: Tadashi Nomura , Hajime Yamada , Ryuichi Kubo
- 申请人地址: JP Kyoto
- 专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人地址: JP Kyoto
- 代理机构: Keating & Bennett, LLP
- 优先权: JP2002-279428 20020925
- 主分类号: H03H9/09
- IPC分类号: H03H9/09 ; H03H9/54
摘要:
A piezoelectric resonator includes a supporting substrate having an opening or a concavity, a vibrating section in which at least one pair of an upper electrode and a lower electrode oppose each other so as to sandwich an upper surface and a lower surface of at least one layer of piezoelectric thin film, the vibrating portion being formed over the opening or the concavity, and a heat dissipating film disposed over at least one of the upper electrode and the piezoelectric thin film so as not to cover the vibrating section.
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