Invention Grant
- Patent Title: Acoustic resonator performance enhancements using recessed region
- Patent Title (中): 使用凹陷区域的声谐振器性能增强
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Application No.: US10867540Application Date: 2004-06-14
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Publication No.: US07161448B2Publication Date: 2007-01-09
- Inventor: Hongiun Feng , Ronald S. Fazzio , Paul D. Bradley , Richard C. Ruby
- Applicant: Hongiun Feng , Ronald S. Fazzio , Paul D. Bradley , Richard C. Ruby
- Applicant Address: SG Singapore
- Assignee: Avago Technologies Wireless IP (Singapore) Pte. Ltd.
- Current Assignee: Avago Technologies Wireless IP (Singapore) Pte. Ltd.
- Current Assignee Address: SG Singapore
- Main IPC: H03H9/15
- IPC: H03H9/15 ; H03H9/54

Abstract:
An acoustic resonator includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and a recessed region. The substrate has a first surface. The first electrode is adjacent the first surface of the substrate. The layer of piezoelectric material is adjacent the first electrode. The second electrode is adjacent the layer of piezoelectric material. The second electrode has a second electrode perimeter that is shaped as a polygon. The recessed region is adjacent the second electrode. The recessed region has a shape defining a recessed region perimeter. The recessed region perimeter is recessed relative to the second electrode perimeter.
Public/Granted literature
- US20050275486A1 Acoustic resonator performance enhancements using recessed region Public/Granted day:2005-12-15
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